Customization: | Available |
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After-sales Service: | on Site Installation and Online Support |
Warranty: | 12 Months |
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Input Power | AC 220V±10%, 50/60Hz |
Feature | To remove a variety of contaminants from surfaces of substrates samples Use dry process to clean surfaces with highly effective method Generate energy at wave line between 254nm to 185nm There are Oxygen inlet port, Ozone removal pump, and LCD display unit Sample temperature measurement feature Buzzer for indication completion of cleaning Locking feature for locking sample feeding tray to avoid opening during operation |
UV Lamp | UV lamp power: 120W Max. Wave length: 254 nm and 185 nm Max substrate size: 150 x 150 mm ( 6"x 6") |
Chamber & Sample Stage | Tray size: 176mm x 168mm Sample feeding: slide based |
LCD Display | Time Duration: 1 - 99 sec / min / hr Sample Temperature measurement feature |
Warranty | One-year limited warranty with lifetime support ( no warranty for Pyrex glass chamber ) |
Application | Cleaning molecular contamination from SPTs, AFM tips, and surfaces Curing UV-adhesives UV-photopatterning of SAM surfaces Oxidizing PDMS Surface sterilization Etch, pattern, sharpen Clean MEMS devices Clean substrate surfaces such as Si, Ge, GaAs and all oxide crystal substrate |
Consumable Parts | Replacement lamps |