Customization: | Available |
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After-sales Service: | on Site Installation and Online Support |
Warranty: | 12 Months |
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Model | KS-SD-900M magnetron sputtering coater/coating machine |
Vacuum pump set | (Oil required) rotary vacuum pump |
Rotary pumping speed | 50 Hz : 8 m³/h (2.2 L/s)/ 60 Hz : 9.6m³/h (2.6 L/s) |
Vacuum limit | 2 Pa |
Max sputtering current | 100mA |
Working pressure | 20Pa - 8 Pa |
Vacuuming time | <5 Min(2 Pa) |
Vacuum measure | Measuring range from atmosphere to 2*10-2mbar |
Chamber size | Φ150*120mm (height) scratch resistant quartz glass |
Magnetron target source | Target size φ50*0.1mm(Au)/target source: Au,Ag,Pt |
Operation method | Instruction Manual |
Weight/size | 45kg/360mm length x 300mm wide x 380mm high |
Power supply | AC 110V 60Hz or AC 220V 50Hz |
Power consumption | <1500W |
Cooling method | Water cooling(optional) |
Warranty | One year limited warranty with lifetime product support |